Evaluation on the Figure Errors of Optical Aspheric Surfaces after Magnetorheological Polishing

程灏波,冯之敬,王英伟

DOI: https://doi.org/10.3321/j.issn:1000-0054.2004.11.018

2004-01-01

Abstract:A method combining power spectral density PSD and residual errors evaluation was developed to accurately evaluate the residual figure errors on aspheric surfaces after polishing. By applying the PSD and residual errors evaluation criterion to the magnetorheological polishing MRP process, the relationship between residual errors and polishing processes was determined, which is helpful to establish the MRP model. A parabolic mirror was manufactured according to the criterion with a final figure accuracy up to 1/30 of the wavelength λλ=0.632 8 μm and residual errors less than 3/1 000 of λ. Experimental results indicate that the method can provide wider control degrees of freedom for decreasing figure errors during fabricating aspheric components by MRP.