Abstract:Great interest in nanoscale thin films (sub-100nm) has been stimulated by the developing demands of functional devices. In this paper, nanoscale zinc oxide (ZnO) thin films were deposited on glass substrates at 300°C by pulsed-spray evaporation chemical vapor deposition. Scanning electron micrographs indicate uniform surface morphologies composed of nanometer-sized spherical particles. The growth kinetics and growth mode are studied and the relationship between the film thickness and the electric properties with respect to the growth mode is interpreted. X-ray diffraction shows that all ZnO films grown by this process were crystallized in a hexagonal structure and highly oriented with their c-axes perpendicular to the plane of the substrate. Optical measurements show transparencies above 85% in the visible spectral range for all films. The absorbance in the UV spectral range respects well the Beer–Lambert law, enabling an accurate optical thickness measurement, and the absorption coefficient was measured for a selected wavelength. The measured band gap energies exhibit an almost constant value of 3.41eV for all films with different thicknesses, which attributed to the thickness-independent crystallite size.

Growth of Non-Polar A-Plane Zn1−Cd O Films by Pulsed Laser Deposition

The growth of nanoscale ZnO films by pulsed-spray evaporation chemical vapor deposition and their structural, electric and optical properties

Growth of non-polar a -plane ZnO 1−x S x films by pulsed laser deposition

Realization of Na-doped P-Type Non-Polar A-Plane Zn1−xCdxO Films by Pulsed Laser Deposition

Growth of Non-Polar Zn1−x Mg X O Thin Films with Different Mg Contents on R-Plane Sapphire Substrates by Plasma-Assisted Molecular Beam Epitaxy

Epitaxial growth of non-polar m-plane ZnO thin films by pulsed laser deposition

Growth of Na doped p-type non-polar a-plane ZnO films by pulsed laser deposition

Growth of P-Type A-Plane Zno Thin Films on R-Plane Sapphire Substrates by Plasma-Assisted Molecular Beam Epitaxy

Non-polar A-Plane ZnO Films Grown on R-Al2o3 Substrates Using GaN Buffer Layers

Band Gap Modulation of ZnCdO Alloy Thin Films with Different Cd Contents Grown by Pulsed Laser Deposition

Structural and Optical Characterizations of ZnO Films Grown by Reactive Electron Beam Evaporation

p-type non-polar m-plane ZnO films grown by plasma-assisted molecular beam epitaxy

Effect of Oxygen Pressure on Structural and Electrical Properties of Pulsed Laser Deposition-Derived Zn0.95mg0.05o: Li Thin Films

Growth Orientation and Properties of ZnCoO Thin Films

Initial growth behavior and resulting microstructural properties of heteroepitaxial ZnO thin films on sapphire (0001) substrates

Low-Temperature C-Axis Oriented Growth of Nanocrystalline Zno Thin Films on Si Substrates by Plasma Assisted Pulsed Laser Deposition

Growth and Optical Properties of Nonpolar ($10{\bar {1}}0$) Zn1‐xCoxO Epitaxial Film on a Γ‐lialo2 Substrate

Realization of nonpolar a-plane ZnO films on r-plane sapphire substrates using a simple single-source chemical vapor deposition

Growth and Optical Properties of Co-Doped ZnO thin Films Prepared by PLD

Growth of Zn1-xMgxO Films by Pulsed Laser Deposition

Growth and Properties of ZnO Film on CVD Diamond Film by Pulsed Laser Deposition