Abstract:In this paper, we present the design, fabrication and measurement results of a 2D scanning mirror actuated by 1 × 10 piezoelectric Pb(Zr,Ti)O3 (PZT) cantilever actuators integrated on a thin silicon beam. A combination of bulk silicon micromachining based on a silicon-on-insulator (SOI) substrate and thin-film surface micromachining on a 5 µm thick Si device layer is used to fabricate the device. Multi-layers of Pt/Ti/PZT/Pt/Ti are deposited as electrode materials. A large silicon mirror plate (5 mm × 5 mm) and a 1 × 10 PZT cantilever array arranged in parallel are formed after the backside release process. The ten PZT cantilever actuators are electrically isolated from one another. The device can operate in three modes: bending, torsional and mixed (or combinational) modes. In bending mode, the first resonant frequency was measured to be 30 Hz and an optical deflection angle of ±8° was obtained when all ten cantilevers were actuated at 9 Vpp. In torsional mode, the resonant frequency was measured to be 89 Hz and an optical deflection angle of ±4.6° was obtained by applying a gradually declining ac voltage started at 8 Vpp to two sets of actuators, where each set comprises five cantilever actuators of the said 1 × 10 array, i.e. 1–5 and 6–10. A 2D raster scanning pattern was achieved in the mixed mode when the bending mode was carried out by cantilever actuators of 4–7 and the torsional modes were exercised by two different sets of cantilever actuators, i.e. 1–3 and 8–10, under opposite biasing direction. This mixed mode operation mechanism demonstrates the first 2D raster scanning mirror-driven beam actuators.

Tip-tilt-piston Piezoelectric Micromirror with Folded PZT Unimorph Actuators

A Piezoelectric Unimorph Actuator Based Tip-Tilt-piston Micromirror with High Fill Factor and Small Tilt and Lateral Shift

Tip-Tilt-Pistion Micromirror Based On Symmetrical Lateral-Shift-Free Piezoelectric Actuators

A Tip-Tilt-Piston Micromirror With Symmetrical Lateral-Shift-Free Piezoelectric Actuators

A tip-tilt-piston micromirror with a double S-shaped unimorph piezoelectric actuator

An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs

Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator

A Tip-Tilt-Piston Micromirror Array for Optical Phased Array Applications

Novel Piezoelectric Actuation Mechanism for a Gimbal-Less Mirror in 2D Raster Scanning Applications

Design And Optimization Of Micro Scanner Driven By Folded Piezoelectric Unimorph Actuators Using Pzt Films

An Electrothermal Micromirror with J-shaped Bimorph Microactuators

Hysteresis Property of Tip-Tilt-Piston Micromirror Based on Tilt-And-Lateral Shift-Free Piezoelectric Unimorph Actuator

Design of Butterfly Plate Piezoelectric Actuator with Dual Driving Electrodes for MEMS Micro-Mirror

A Silicon-based Scanning Micromirror Actuated by Piezoelectric Cantilevers Using PZT

A Piezoelectrically Actuated Scaning Micromirror Integrated with Angle Sensors

Feedback Controlled Pzt Micromirror with Integrated Buried Piezoresistors

Dual-Axis Piezoelectric Mems Micromirror with Adjustable Aspect Ratio of Lissajous Patterns Through Structure Design and Electrode Arrangement

Design and Analysis of a Novel Two-axis Flexible Piezoelectric Thin Sheet Tilt Mirror

Development Of A Low Capacitance Two-Axis Piezoelectric Tilting Mirror Used For Optical Assisted Micromanipulation

Development of Piezoelectric Driving MEMS Scanning Mirror

3.8×3.8 mm2 Tiny Piezoelectric Resonant MEMS Scanner Using Fork-Shaped and Ring-Shaped Actuators