Micro Thermal Flow Sensors/systems on Flexible PCB and Extensive Applications

Rong Zhu,RuiYi Que,Zhe Cao

DOI: https://doi.org/10.1109/nems.2013.6559709

2013-01-01

Abstract:We demonstrate our researches on developing micro thermal flow sensors by depositing nano metallic films on flexible substrates for detecting surface flow. The fabrication of the sensors is incorporating standard printed circuit technique with micromachining deposit/sputter, which takes advantages of low cost, easy fabrication, easy packaging and integrating sensors with processing circuits. The applications using the sensors to detect airflow around air vehicles, underwater wall shear stress, and to measure respiratory flow for monitoring and diagnosing respiratory diseases are also presented.