Oxygen-induced physical property variation of deposited ZnO films by metal-organic chemical vapor deposition

Zhifeng Shi,ShiKai Zhang,Bin Wu,Xupu Cai,Jinxiang Zhang,Wei Yin,Hui Wang,Jinzhong Wang,Xiaochuan Xia,Xin Dong,Baolin Zhang,Guotong Du
DOI: https://doi.org/10.1016/j.apsusc.2012.05.072
IF: 6.7
2012-01-01
Applied Surface Science
Abstract:High-quality ZnO thin films were deposited on 6HSiC substrates using metal-organic chemical vapor deposition system. The physical properties of as-prepared ZnO layers under various oxygen flow rate were thoroughly studied. An increase in the O/Zn ratio yielded a decrease in growth rate. The experimental results also indicated that the size of ZnO nanoparticles, lattice constant and compressive stress inside the films displayed a regular variety as a function of O 2-flow rate. In addition, with increase of oxygen discharge, the position of deep-level emission in photoluminescence spectra demonstrated a significant shift, with transformation from oxygen vacancy to zinc vacancy. The qualitative calculation from X-ray photoelectron spectroscopy data showed that higher O 2-flow rate was able to promote OZn bond formation and reduce the number of oxygen vacancies. © 2012 Elsevier B.V. All rights reserved.
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