Fabrication and Properties of High Curie Temperature Xbizn1/2ti1/2o3–(1−x)pbtio3 Piezoelectric Films by a Sol–Gel Process

Caifu Zhong,Limin Guo,Xiaohui Wang,Longtu Li
DOI: https://doi.org/10.1111/j.1551-2916.2011.05024.x
IF: 4.186
2012-01-01
Journal of the American Ceramic Society
Abstract:The xBiZn1/2Ti1/2O3–(1−x)PbTiO3 (BZT–PT, x = 0.1–0.3) thin films were fabricated on Pt(111)/Ti/SiO2/Si substrates via an aqueous sol–gel method. Highly (100) oriented BZT–PT films with thickness of 600 nm were obtained by introducing PbO seeding layers. Dense uniform microstructures with average grain size of about 50 nm were observed for these films. The dielectric, ferroelectric, and piezoelectric properties of the BZT–PT thin films were investigated. The curie temperature of the BZT–PT films was about 535°C for x = 0.2, and higher than 600°C for x = 0.3. The local effective piezoelectric coefficient of the (100) oriented BZT–PT films was approximately 40 pm/V for x = 0.3.
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