Enhancement in Hardness and Transmittance of ZnS Via SiO2/Y2O3 Multilayer

Huayu Zhang,Lei Jin,Bo Song,Jiecai Han,Guigen Wang,Xuping Kuang,Rui Sun
DOI: https://doi.org/10.1016/j.jallcom.2012.06.019
IF: 6.2
2012-01-01
Journal of Alloys and Compounds
Abstract:The cSiO(2)/bY(2)O(3)/aSiO(2)/ZnS/aSiO(2)/bY(2)O(3)/cSiO(2) system was fabricated to enhance the hardness and improve the transmittance of Zinc sulfide. The data of each thickness was obtained by the simulation of Filmstar package. 150 nmSiO(2) film was used to release the stress between ZnS and Y2O3 film as a buffer layer. Smooth SiO2 and crack-free Y2O3 films were successfully obtained. It was found that hardness of the multilayer system increased from 250 to 430 Kg/mm(2) and transmittance increased from 63% to 83% at 3-5 mu m. (C) 2012 Elsevier B.V. All rights reserved.
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