Microstructural Properties of Over-Doped Gan-Based Diluted Magnetic Semiconductors Grown by Mocvd

Tao Zhikuo,Zhang Rong,Xiu Xiangqian,Cui Xugao,Li,Li Xin,Xie Zili,Zheng Youdou,Zheng Rongkun,Simon P. Ringer
DOI: https://doi.org/10.1088/1674-4926/33/7/073002
2012-01-01
Journal of Semiconductors
Abstract:>We have grown transition metal(Fe,Mn) doped GaN thin films on c-oriented sapphire by metal-organic chemical vapor deposition.By varying the flow of the metal precursor,a series of samples with different ion concentrations are synthesized.Microstructural properties are characterized by using a high-resolution transmission electron microscope.For Fe over-doped GaN samples,hexagonal Fe 3 N clusters are observed with Fe 3 N(0002) parallel to GaN(0002) while for Mn over-doped GaN,hexagonal Mn 6 N 2.58 phases are observed with Mn 6 N 2.58 (0002) parallel to GaN(0002).In addition,with higher concentration ions doping into the lattice matrix,the partial lattice orientation is distorted,leading to the tilt of GaN(0002) planes.The magnetization of the Fe over-doped GaN sample is increased,which is ascribed to the participation of ferromagnetic iron and Fe 3 N.The Mn over-doped sample displays very weak ferromagnetic behavior,which probably originates from the Mn 6 N 2.58 .
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