Abstract:The hard-to-process properties associated with high hardness and high brittleness of sapphire drastically limit the services of optics, low-damage or damage-free properties are essential to the performance of sapphire optics. To achieve efficient and damage-free sapphire optics, a series of experiments involving ultra-precision grinding, polishing, and ion beam polishing were conducted. Initially, the surface and subsurface characteristics of sapphire ultra-precision grinding were examined, and the evolution of damage during polishing was discussed. Chemical etching was performed to evaluate the subsurface damage caused by polishing, ion beam polishing was used to eliminate subsurface damage. Finally, focused ion beam (FIB) and transmission electron microscopy (TEM) were employed to analyze the atomic structure of the subsurface. The results demonstrated that ultra-precision grinding can produce a ductile grinding surface and minimize subsurface damage, the difference in grinding damage on the outside and center of the workpiece was suppressed. The evolution of the surface roughness and damage behavior during polishing varied depending on the specific grinding strategy, ultra-precision grinding decreased damage removal time by 1/4. Photothermal absorption was utilized to monitor the damage progression during the polishing process and detect the presence of subsurface damage beneath the Beilby layer. Etching revealed that the subsurface damage was primarily caused by scratches, which was effectively eliminated after ion beam polishing. High-magnification TEM images provided compelling evidence of damage at the close-to-atomic scale for sapphire optics. Only amorphous structures smaller than 2 nm were observed on the subsurface, most of the atomic structure remained intact, albeit with irregular arrangement. Additionally, the grinding marks were mitigated after polishing.

Mechanical Polishing to Improve Uniformity of Beam Sampling Grating and Its Effects on Laser-Induced Damage

Chemical Mechanical Polishing to Improve the Efficiency Uniformity of Beam Sampling Grating

Algorithms for Finely Adjusting Etch Depths to Improve the Diffraction Efficiency Uniformity of Large-Aperture Bsg

Effect of different grinding strategies on subsequent polishing processes of sapphire

Research on Ion Beam Finishing (IBF) for Complex-Shape Single Crystal Silicon Mirror Applied in High-Energy Laser System

Chemical Mechanical Polishing of Micro-structures on SSiC

Improving Polishing Efficiency of RB-SiC through Femtosecond Laser Pretreatment

Effects of Scanning Speed on the Polished Surface Quality of Mold Steel by Dual-Beam Coupling Nanosecond Laser

Meniscus and Spin Coating Methods for Coating SiO<sub>2</sub> Sol-Gel Antireflective Film on Beam Sampling Grating

Influence Of Pulse Energy And Scanning Speed Of Femtosecond Laser On Surface Roughness Of Sic Ceramics

Formation Mechanism of a Smooth, Defect-Free Surface of Fused Silica Optics Using Rapid CO2 Laser Polishing

Improving surface quality and superficial microstructure of LDED Inconel 718 superalloy processed by hybrid laser polishing

Fabrication of the Combined Color Separation Grating and Beam Sampling Grating Element Applied in Inertial Confinement Fusion Driver

Influence of surface morphology and processing parameters on polishing of silicon carbide ceramics using femtosecond laser pulses

Single-row laser beam with energy strengthened ends for continuous scanning laser surface hardening of large metal components

Influence of Pulse Energy and Defocus Amount on the Mechanism and Surface Characteristics of Femtosecond Laser Polishing of SiC Ceramics

Metal/multilayer-dielectric Coated Grating for Chirped Pulse Amplification Laser System

Effect of grain boundary on polycrystalline diamond polishing by high-speed dynamic friction

Optimisation of the laser polishing for laser-powder bed fusion and electron beam-powder bed fusion Ti6Al4V surfaces

Laser Assisted Surface Conditioning of a Residual Pattern on Single Crystal Silicon Induced by Ultra-Precision Cutting

Oblique ultrasonic vibration-assisted polishing for grating structures of BK7 optical glass