Preparation of Synthetic Antiferromagnetic Coupled FeCoN/Ru/FeCoN Films

Luran Zhang,Jiangwei Cao,Ying Wang,Jianmin Bai,Fulin Wei
DOI: https://doi.org/10.1016/j.matlet.2011.12.125
IF: 3
2012-01-01
Materials Letters
Abstract:The FeCoN/Ru/FeCoN sandwich films were deposited on glass substrate by magnetron sputtering system. The antiferromagnetic behavior of FeCoN sandwich films can be tuned by varying the thickness of FeCoN layer and Ru interlayer, the preparation conditions such as the sputtering power of FeCoN layer, and the oblique angle when deposited. It is found that effective anisotropy field (Hk) relates to the exchange coupling field (Hex) in synthetic antiferromagnetic sandwich films. The synthetic antiferromagnetic films with high saturation magnetization (Ms), large exchange coupling field (Hex) and Hk were obtained by using the optimum thickness, low sputtering power of FeCoN layers and big oblique angle when deposited, which is very suitable for the soft magnetic underlayer's (SUL) applications.
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