Polyimide sacrificial layer for micromachining

Cheng Pan,Xiaomei Yu,Shenglin Ma
2012-01-01
Abstract:In this paper, we discussed the process to use polyimide as sacrificial layer for micromachining. The micromachining methods, such as fabrication, chemical durability of PI layers, pattern and release methods have been explicitly studied. In this experiment, PI2610 provided by HD Microsystems is used to fabricate the PI layer. The fabrication process has been studied carefully in order to obtain ideal surface and thickness of the PI layer. For the reason that some chemicals will be involved in the micromachining, a few chemicals have been tested to ensure the right chemicals could be chosen. And sorts of round or square release holes with various size have been designed to study how can the release holes impact the releasing. We find that more but small release holes should be designed, this has benefit of obtaining ideal releasing and enough structure area. Further more, to implement this process, a biomaterial cantilever FPA is designed and fabricated. This experiment proved that the PI should be an excellent material used in CMOS compatible micromachining.
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