Low-Temperature Synthesis and Gas Sensing Properties of Anatase TiO2 Thin Films

Fu Jian Ren,Yi Sun,Liang Huang,Yun Han Ling,Jia You Feng
DOI: https://doi.org/10.4028/www.scientific.net/kem.492.300
2011-01-01
Key Engineering Materials
Abstract:Crystalline anatase TiO2thin films were obtained on glass substrates at 60°C, 75°C and 90°C, respectively, by liquid phase deposition (LPD) method without subsequent heat treatment. X-ray diffraction (XRD), atomic force microscopy (AFM) and UV-Vis spectrophotometer were used to characterize the as-synthesized TiO2thin films. The H2sensing properties of the TiO2thin films based sensors were investigated. The results show that the gas sensors signal Ra/Rg (Ra: resistance in air, Rg: resistance in a sample gas) decreases with the increasing deposition temperature. The TiO2thin films obtained at deposition temperature of 60°C exhibited the maximum H2gas response at 350°C, and the magnitude of the sensor signal and the response time for 500ppm H2was 1.25 and 17s, respectively.
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