Abstract:Focal plane array (FPA) detector has characteristics of low cost, operating at room temperature, compatibility with the silicon CMOS technology and high detecting performance, therefore it becomes a hot spot in infrared (IR) or terahertz (THz) detect field recently. However, the tradition structure of micro-bolometer has the conflict of the pixel size and thermal performance. In order to improve the detecting performance of small pixel size bolometer, high fill factor and low thermal conductance design should be considered. In IR detecting, double layers structure is an efficient method to improve the absorption of micro-bolometer and reduce thermal conductance. The three dimension model of small size micro-bolometer was built in this article. The thermal and mechanical characters of those models were simulated and optimized, and finally the double layer structure micro-bolometer was fabricated with multifarious semiconductor recipes on the readout integrated chip wafer. For THz detecting, to improve the detecting performance, different dimension THz detectors based on micro-bridge structure were designed and fabricated to get optimizing micro-bolometer parameters from the test results of membrane deformation. A nanostructured titanium thin film absorber is integrated in the micro-bridge structure of the VOx micro-bolometer to enhance the absorption of THz radiation. Continuous-wave THz detection and imaging are demonstrated with a 2.52 THz far infrared CO2 laser and fabricated 320x240 vanadium oxide micro-bolometer focal plane array with optimized cell structure. With this detecting system, THz imaging of metal concealed in wiping cloth and envelope is demonstrated.

Simulation of structures for two-layer infrared microbolometers

Advanced design of microbolometers for uncooled infrared detectors

Design and Simulation of Microbolometer with Dual Cavity for High Figure of Merits

Simulation Of Micro-Bolometer Using Double Sacrificial Layers Structure

Study on Optical Properties of Two-Color Microbolometers

Design And Fabrication Of Micro-Bolometer Array With Double Layers Structure

OPTICAL AND THERMAL DESIGN FOR MICROBOLOMETER

Study on Optical Properties of Microbolometers in Oblique Incidence

Athermal design of long-wave infrared optical system with hybrid refractive/diffractive

Recent Developments of Micro-Bolometer Using Double Sacrificial Layers

Finite Element Analysis of Pixel Structure of Uncooled Microbolometer for Food Operation Environment

Analysis on Vibrations and Infrared Absorption of Uncooled Microbolometer

Focal Plane Array Detectors With Micro-Bolometer Structure And Its Application In Ir And Thz Imaging

Study on new structure uncooled a-Si microbolometer for infrared detection

Optical Optimization and Simulation of Micro-bolometers Based on Α-Si:H Thin Film

Wavelength and Thermal Distribution Selectable Microbolometers Based on Metamaterial Absorbers

Modeling of Microbolometer

Performance Analysis of Microbolometer Microbridge Structure

Simulation of Microbolometers Based on A-Si:H Thin Films with Thermal and Mechanical Performance

Investigating thermal properties of 2D non-layered material using a NEMS-based 2-DOF approach towards ultrahigh-performance bolometer

Optical, Mechanical and Electrical Characteristics of Thermal Uncooled Bolometric Type Detector Based on Vanadium Oxide