Preparation of Na0.5K0.5NbO3 Lead-Free Piezoelectric Thin Films with Metal-Organic Salt Thermo Decomposition Method

阎鑫,任巍

DOI: https://doi.org/10.3969/j.issn.1001-2028.2010.10.008

2010-01-01

Abstract:Lead-free piezoelectric Na0.5K0.5NbO3 (NKN) thin films were prepared by metal-organic salt thermo decomposition method. Sodium acetate, potassium acetate and niobium pentaethoxide were selected as raw materials for the preparation of NKN precursor solutions. The structure and morphology of the NKN thin films at different annealing temperatures were studied. The results show that the NKN thin films are amorphous below 500 ℃. The NKN thin films annealed at 650 ℃ have a preferred orientation along with (l00) directions. The surpace of prepared NKN thin films is dense and the distribution of NKN particle size is uniform. The NKN thin films annealed at 650 ℃ exhibit relative permittivity of 258 and loss tangent of 0.05 at 10 kHz. The typical ferroelectric hysteretic loop is obtained with Pr and EC of 3. 45×10–6 C/cm2 and 160×103 V/cm, respectively.