Chemical Cleaving Method of Relief Microstructure Formation on Dichromated Gelatin

L Pang,YB Yan,GF Jin,MX Wu
DOI: https://doi.org/10.1364/ao.39.002184
IF: 1.9
2000-01-01
Applied Optics
Abstract:A chemical cleaving method to improve the resolution of relief modulation in dichromated gelatin is presented. The process (which uses hydroxylamine) yields higher relief resolution and better profile fidelity than a process that uses the enzyme trypsin because it has many fewer cleaving sites. Experiments prove that relief modulation can produce a resolution of as much as 500 lines/mm. With a projection exposure system, a microprism array with a 30-mu m-wide, 0.8-mu m-high cell is fabricated by this method. A method for forming a continuous relief on dichromated gelatin is also discussed. (C) 2000 Optical Society of America.
What problem does this paper attempt to address?