Enhancing the Thermal Conductivity of Polymer-Assisted Deposited Al 2 O 3 Film by Nitrogen Doping

Huang Jiang,Zhang Yin,Pan Tai-Song,Zeng Bo,Hu Guo-Hua,Lin Yuan
DOI: https://doi.org/10.1088/1674-1056/21/12/126501
2012-01-01
Abstract:Polymer-assisted deposition technique has been used to deposit Al 2 O 3 and N-doped Al 2 O 3 (AlON) thin films on Si(100) substrates.The chemical compositions,crystallinity,and thermal conductivity of the as-grown films have been characterized by X-ray photoelectron spectroscopy(XPS),X-ray diffraction(XRD),and 3-omega method,respectively. Amorphous and polycrystalline Al 2 O 3 and AlON thin films have been formed at 700℃and 1000℃.The thermal conductivity results indicated that the effect of nitrogen doping on the thermal conductivity is determined by the competition of the increase of Al-N bonding and the suppression of crystallinity.A 67%enhancement in thermal conductivity has been achieved for the samples grown at 700℃,demonstrating that the nitrogen doping is an effective way to improve the thermal performance of polymer-assisted-deposited Al 2 O 3 thin films at a relatively low growth temperature.
What problem does this paper attempt to address?