Abstract:Ni–Mn–Ga thin films have been fabricated by using magnetron sputtering technique under various substrate negative bias voltages. The effect of substrate negative bias voltage on the compositions and surface morphology of Ni–Mn–Ga thin films was systematically investigated by energy dispersive X-ray spectrum and atomic force microscopy, respectively. The results show that the Ni contents of the thin films increase with the increase of the substrate negative bias voltages, whereas the Mn contents and Ga contents decrease with the increase of substrate negative bias voltages. It was also found that the surface roughness and average particle size of the thin films remarkably decrease with the increase of substrate negative bias voltages. Based on the influence of bias voltages on film compositions, a Ni56Mn27Ga17 thin film was obtained at the substrate negative bias voltage of 30V. Further investigations indicate that the martensitic transformation start temperature of this film is up to 584K, much higher than room temperature, and the film has a non-modulated tetragonal martensitic structure at room temperature. Transmission electron microscopy observations reveal that microstructure of the thin film exhibits an internally (111) type twinned substructure. The fabrication of Ni56Mn27Ga17 high-temperature shape memory alloy thin film will contribute to the successful development of microactuators.

Transformation Behaviors,structural and Magnetic Characteristics of Ni-Mn-Ga Films on MgO（001）

Evolution of Magnetic Domain Structure of Martensite in Ni-Mn-Ga Films under the Interplay of the Temperature and Magnetic Field

Martensitic Transformation Behavior of Ni<sub>54.75</sub>Mn<sub>13.25</sub>Fe<sub>7</sub>Ga<sub>25</sub> Ferromagnetic Shape Memory Thin Film

Martensitic transformation behavior of Ni54.75Mn 13.25Fe7Ga25 ferromagnetic shape memory thin film

Structural, Magnetic and Mechanical Properties of Oligocrystalline Ni-Mn-Ga Shape Memory Microwires

Origin Of Room Temperature Ferromagnetism In Mgo Films

Preparation and characterization of Ni–Mn–Ga high temperature shape memory alloy thin films using rf magnetron sputtering method

Reversible Magnetic-Field-induced Martensitic Transformation over a Wide Temperature Window in Ni42−xCoxCu8Mn37Ga13 Alloys

Martensitic Transformation of Ni–Fe–Ga Magnetic Shape Memory Alloys

Magnetic-Field-Induced Martensitic Transformation in Mnniga : Co Alloys

High-temperature Metamagnetic Martensitic Transformation in Fairly Mn-rich Ni50−Co Mn37Ga13 (0 ≤x≤ 50) Alloys

Phase Transformation and Magnetic-Field-Induced Strain in Ni50-Xmn29+Xga21(X=0-4) Alloys

Effect of Annealing Temperature on the Microstructure and Mechanical Properties of Ni-Mn-Ga-Gd Thin Film

Martensitic transformation and magnetic-field-induced strain in Ni-Mn-Ga magnetic shape memory alloys

Martensitic Transformation and Microstructure of the Magnetron-Sputtered Ni56Mn27Ga17 High Temperature Shape Memory Alloy Thin Film

Martensitic Transformation Behaviors and Magnetic Properties of Ni–Mn–Ga Rapidly Quenched Ribbons

Intermartensitic Transformation Of Ni-Fe-Ga Magnetic Shape Memory Alloys

Transformation temperatures and magnetoplasticity of Ni–Mn–Ga alloyed with Si, In, Co or Fe

Growth of Ni–Mn–Ga High-Temperature Shape Memory Alloy Thin Films by Magnetron Sputtering Technique

Observation of magnetic domain evolution in constrained epitaxial Ni-Mn-Ga thin films on MgO(001)substrate

The Martensitic Transformation and the Magnetocaloric Effect in Ni50−xMn38+xIn12 Alloys