Abstract:The simultaneous growth of both nanodiamonds and graphene on copper samples is described for the first time. A PE-CVD process is used to synthesize graphene layers and nanodiamond clusters from a hydrogen/methane gas mixture as it is typically done successfully in thermal CVD processes for graphene synthesis. However, the standard thermal CVD process is not without problems since the deposition of graphene is affected by the evaporation of a notable amount of copper caused by the slow temperature increase typical for thermal CVD resulting in a long process time. In sharp contrast, the synthesis of graphene by PE-CVD can circumvent this problem by substantially shortening the process time at holding out the prospect of a lower substrate temperature. The reduced thermal load and the possibility to industrially scale-up the PE-CVD process makes it a very attractive alternative to the thermal CVD process with respect to the graphene production in the future. Nanodiamonds are synthesized in PE-CVD reactors for a long time because these processes offer a high degree of control over the film’s nanostructure and simultaneously providing a significant high deposition rate. To model the co-deposition process, the three relevant macroscopic parameters (pressure, gas mixture and microwave power) are correlated with three relevant process properties (plasma ball size, substrate temperature and C2/Hα-ratio) and the influence on the quality of the deposited carbon allotropes is investigated. For the evaluation of the graphene as well as the nanodiamond quality, Raman spectroscopy used whereas the plasma properties are measured by optical methods. It is found that the diamond nucleation can be influenced by the C2/Hα-ratio in the plasma, while the graphene quality remains mostly unchanged by this parameter. Moreover it is derived from the experimental data that the direct plasma contact with the copper surface is beneficial for the nucleation of the diamond while the growth and quality of the graphene benefits from a larger distance to the plasma. Therefore, this work presents a basis for a method to tailor the deposition of graphene–diamond hybrid films using a MW PE-CVD process or to suppress the diamond deposition entirely if desired.

Investigation on Nanodiamond and Carbon Nanotube‐Diamond Nanocomposite Synthesized Using RF‐PECVD

The Structural Evolution Of Nanocrystalline Diamond Films Synthesized By R.F. Pecvd

Growth of Nanocrystalline Diamond Films on Co-Cemented Tungsten Carbide Substrates by Hot Filament CVD

Nano-crystalline Diamond Films Synthesized at Low Temperature and Low Pressure by Hot Filament Chemical Vapor Deposition

Synthesis of Nanocrystalline Diamond Films on Smooth Wc-Co Cemented Carbide Substrates

Deposition and Characterization of Nanocrystalline Diamond Films on Co-cemented Tungsten Carbide Inserts

Preparation of Diamond Films by Hot Filament Chemical Vapor Deposition and Nucleation by Carbon Nanotubes

High quality nanocrystalline diamond films grown by RF-HFCVD

Structural and optical characterizations of nanostructured diamond films grown on Si(001) substrates

Coupling Effects of Methane Concentration and Nitrogen Addition Level on Morphologies and Properties of MPCVD Diamond Films on WC-Co Substrates

Synthesis and Mechanism Study of Carbon Nanowires, Carbon Nanotubes, and Carbon Pompons on Single-Crystal Diamonds

Enhanced Nucleation and Growth of Diamond Film on Si by CVD Using a Chemical Precursor

Development Of Nanocrystalline Diamond Films And Their Performances

Preparation and Properties of Micro- Nano Diamond Composite Film

Nanocrystalline Diamond Film Grown by Pulsed Linear Antenna Microwave CVD

Optical Properties of Nano-Crystalline Diamond Films Deposited by MPECVD

Fast, Efficient Tailoring Growth of Nanocrystalline Diamond Films by Fine-Tuning of Gas-Phase Composition Using Microwave Plasma Chemical Vapor Deposition

Diamond Nucleation on Unscratched Silicon Substrates Coated with Various Non-Diamond Carbon Films by Microwave Plasma-Enhanced Chemical Vapor Deposition

Role Of Nucleation In Nanodiamond Film Growth

Simultaneous synthesis of nanodiamonds and graphene via plasma enhanced chemical vapor deposition (MW PE-CVD) on copper

Effect of CN and CH radicals on diamond and carbon nanotubes growth in MECVD