Synthesis of Nanocrystalline Diamond Films on Smooth Wc-Co Cemented Carbide Substrates

F. H. Sun,Z. M. Zhang,Y. P. Ma,M. Chen

DOI: https://doi.org/10.1504/ijat.2007.015381

2006-01-01

Abstract:Nanocrystalline diamond films (NDFs) are deposited on WC-Co cemented carbide substrates using the acetone, hydrogen and argon as the gas source by the bias-enhanced hot filament CVD. A new pretreatment method is performed to ensure good adhesion between diamond films and substrates by diffusing boron into WC-Co substrate with solid boronization accelerator without surface roughening of smooth WC-Co substrates. The new CVD processes are used to enhance the secondary nucleation, reduce the grain size of nandiamond and promote the growth of NDFs by appropriately increasing acetone concentration, lowering the reactive gases pressure and adding Ar gas in the reactive gases. Research results show that the boronization pretreatment can result in the formation of the stable cobalt boride compounds on the substrate surface, thus effectively suppress cobalt diffusion to the surface and ensure the adhesion of smooth diamond films. NDFs consist of nanocrystalline diamond grains with sizes range from 20 to 60 nm. The surface roughness of NDFs is measured at Ra<50nm. NDFs, which can be obtained on smooth WC-Co substrate surfaces, will not only display good adhesion, but also have smooth surfaces. The diamond-coated drawing dies with these NDFs show obvious effect in the practical application.