Design and Fabrication of Micro RF Coil for MRI

WU Ying,JIANG Yong-qing,ZHOU Zhao-ying,Ono Takahito,Esashi Masayoshi
DOI: https://doi.org/10.3969/j.issn.1001-5868.2006.05.013
2006-01-01
Abstract:The design and novel fabrication of micro RF receiver coil with high aspect ratio for miniature magnetic resonance imaging(MRI) system is presented.This micro coil is realized using micro-electro-mechanical system(MEMS) technique combining deep reactive ion etching(deep-RIE) process and copper electroplating.The inner diameter of the fabricated coil is 100μm,the wire thickness is up to 200μm,the wire width is approximately 30μm and the aspect ratio is about 6.On-wafer electrical characterization shows the quality factor is about 4 at 100MHz,which suggests an alternative method to fabricate metal microstructures with a high aspect ratio.
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