Properties of Fe/Si Heterostructure Grown by Mocvd

Zheng Youdou,Zhang Rong,Yan Yong,Feng Duan,T. W. Kim,B. D. McCombe
DOI: https://doi.org/10.1007/bf00343424
1990-01-01
Applied Physics A Solids and Surface
Abstract:An Fe film was grown on an Si(100) substrate by metalorganic chemical vapor deposition (MOCVD) using thermal decomposition of iron pentacarbonyl, Fe(CO)5. The X-ray diffraction and cross-sectional high resolution electron microscopy (HREM) show that the Fe deposited film is a single crystal Fe film on Si(100). Single crystal Fe/Si Schottky barrier diodes exhibit good rectification.
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