FEASIBILITY OF SEMICONDUCTOR WASTEWATER RECLAMATION BY USING MBR-RO PROCESS

Chen Tong,Hu Yongjian,Han Yongping,Lin Yakai,Wang Xiaolin

DOI: https://doi.org/10.3969/j.issn.1000-3770.2013.02.025

2013-01-01

Abstract:After primary physical-chemical treatment,the semiconductor wastewater contained high concentrations of SS,organics and inorganic salts.It is thus urgent to seek promising technology for semiconductor wastewater reclamation.In this work,a pilot-scale MBR-RO integrated system was developed for semiconductor wastewater reclamation.The study shows that the MBR-RO system is able to treat the semiconductor wastewater of unstable quality with good system stability and high contaminant removal efficiency.The MBR membrane permeability is easily recovered by maintenance cleaning(cycle > 16 days).The MBR effluent exhibits stable quality with SS less than measuring limit,SDI15 of 2.3 and COD of 10.6 mg/L on average,which meets the quality requirement of RO feed water.The RO membrane permeability is well maintained by adjusting RO feed pH with HCl and adding scale inhibitor MAS208A.The RO product water exhibits good quality with TOC less than 0.2 mg/L,conductivity of 26～142 μS/cm,which meets the semiconductor reuse water standard.This work demonstrates the feasibility of using MBR-RO integrated system for semiconductor wastewater reclamation.