Multi-mode Test Method for IC Equipment Functional Simulation Platform

Xu Xia,Feng Juan,Huang Liping,Tian Ling,Li Chunguang
DOI: https://doi.org/10.16526/j.cnki.11-4762/tp.2012.11.040
2012-01-01
Abstract:In order to fully test IC manufacturing equipment and equipment functional simulation platform,a multi-mode test method including single command testing,logic sequence testing and random sequence testing was proposed.Single command testing is to test the command response correctness of device and system.Logic sequence is composed of five kinds of step types,which could realize the simple logic control.Logic sequence testing could test the continuous dynamic operation performance of device and system.Random sequence testing also test the dynamic operation performance through randomly send commands,to make sure device and system can operate normally in that case.Applications on IC manufacturing equipment functional simulation platform show that multi-mode test method is able to test the response correctness and dynamic operation performance of simulation platform.
What problem does this paper attempt to address?