Study Progress on Sculptured Thin Films by Glancing Angle Deposition

Xiao Xiudi,Dong Guoping,Yu Hua,Fan Zhengxiu,He Hongbo,Shao Jianda
2008-01-01
Rare Metal Materials and Engineering
Abstract:Glancing angle deposition is a new technology for thin film preparation. The sculptured thin film (STF) with a variety of shape, such as oblique nanocolumns, zigzag, helix, S-shape, C-shape, and so on can be prepared by substrate rotating and sloping into glancing angle during process. The sculptured thin film with extraordinary optical properties provides a new direction for film design and preparation compared with traditional films. In this paper, the preparation method for sculptured thin film was summarized, the microstructure and preparation parameters of STF analyzed, also its potential application in optical field described. Key
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