Abstract:Understanding the properties that determine the distribution and behavior of trace impurities in Si wafers is critical to defining and controlling the performance, reliability, and yields of integrated microelectronic devices. It remains, however, an intrinsically difficult task to determine trace impurities in Si because of the minute concentrations and extremely high levels of matrix involved. In this study, we used an electrodialyzer for the simultaneous on-line removal of the silicate and acid matrices through the neutralization of the excessive hydrogen ion and selectively separation of acid and silicate ions by the combination of electrode reaction as a source of hydroxide ions with the anion exchange membrane separation. To retain the analyte ions in the sample stream, we found that the presence of moderate amounts of nitric acid and hydrazine were necessary to improve the retention efficiency, not only for Zn(2+), Ni(2+), Cu(2+), and Co(2+) ions but also for CrO(4)(2-) ion. Under the optimized conditions, the interference that resulted from the sample matrix was suppressed significantly to provide satisfactory analytical signals. The precision of this method was ca. 5% when we used an electrodialyzer equipped with an anion exchange membrane to remove the sample matrix prior to performing inductively coupled plasma mass spectrometry (ICP-MS); the good agreement between the data obtained using our proposed method and those obtained using a batchwise wet chemical technique confirmed its accuracy. Our method permits the determination of Zn, Ni, Cu, Co, and Cr in Si wafers at detection limits within the range from 2.2 x 10(15) to 9.0 x 10(15) atoms cm(-3).

Preparation of A High-Concentration Nm-Size Ceramic Silicon Carbide Slurry for the Icp-Oes Determination of Ultra-Trace Impurities in A Sample

Direct Determination of Impurities in High Purity Silicon Carbide by Inductively Coupled Plasma Optical Emission Spectrometry Using Slurry Nebulization Technique

Direct Determination of Trace Impurities in High-Purity Silicon Nitride by Axial Viewed Inductively Coupled Plasma Optical Emission Spectrometry Using A Slurry Nebulization Technique

Effective Separation of Cesium with a New Silica-Calix[4]biscrown Material by Extraction Chromatography

Quantitative Determination of Trace Metals in High-Purity Silicon Carbide Powder by Laser Ablation Inductively Coupled Plasma Mass Spectrometry Without Binders

Transportation and Evaporation Behavior of Suspension Particle for Slurry Nebulization Introduction in Inductively Coupled Plasma Optical Emission Spectrometry

Characterization of stability of ceramic suspension for slurry introduction in inductively coupled plasma optical emission spectrometry and application to aluminium nitride analysis

Tackling the Challenging Determination of Trace Elements in Ultrapure Silicon Carbide by LA-ICP-MS

Study on Purification Technology of Silicon Carbide Crystal Growth Powder

Coupling of an electrodialyzer with inductively coupled plasma mass spectrometry for the on-line determination of trace impurities in silicon wafers after surface metal extraction

Determination of metal impurities in titanium dioxide using slurry sample introduction by axial viewing inductively coupled plasma optical emission spectrometry

Direct Determination of Trace Metals in Boron Carbide by Slurry Introduction Axial Viewed Inductively Coupled Plasma Optical Emission Spectrometry

Elimination of suction effect in interfacing microchip electrophoresis with inductively coupled plasma mass spectrometry using porous monolithic plugs.

Determination of impurities in titanium nitride by slurry introduction axial viewed inductively coupled plasma optical emission spectrometry

Studies of synthesizing the SiC nanometer powders by chemical vapor reaction

In situ trapping of As, Sb and Se hydrides on nanometer-sized ceria-coated iron oxide-silica and slurry suspension introduction to ICP-OES

Research on Dispersion Property of Silicon Carbide Slurry

Sol-gel zirconia coating capillary microextraction on-line hyphenated with inductively coupled plasma mass spectrometry for the determination of Cr, Cu, Cd and Pb in biological samples

Submicron Nonporous Silica Particles for Enhanced Separation Performance in Pcec.

Study on Rheological Behavior of Micro/Nano-Silicon Carbide Particles in Ethanol by Selecting Efficient Dispersants

A novel pretreatment strategy for accurate determination the Al element content within polyaluminumcarbsilane