Application of X-ray photoelectron spectroscopy:detection and analysis of special sample and complex spectrum

Xie Jinglin
DOI: https://doi.org/10.3969/j.issn.1672-7916.2009.05.003
2009-01-01
Abstract:With the use of modem conventional XPS instrument,the careful sample settlement and measurement should be taken for special non-uniform conductive samples to obtain correct spectra.Method of insulating the sample completely from the conductive sample stage was fairly simple way in our experiments.On the other hand, the complex XPS spectrum analysis of multi-chemical states element or sample was archived by special curve fit- ting method which developed by using experimental data of different chemical state.Chemical states and quantita- tive results of the complex samples,such as Ce or Fe containing samples,can be easily obtained comparing with the normal curve fitting method.Some examples of sample preparation and curve fitting were presented.
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