Abstract:The array CCD is irradiated by a 532 nm,10 ns pulsed laser.According to the experiment phenomenon,hard damage process of CCD can be divided into 3 stages.In the first stage,when the CCD is irradiated by the laser with a low energy density,local white blind spots appears,which can not be recovered,while other parts of CCD can work normally.In the second stage,vertical bright white lines appear in the clock line direction of the light spot after irradiation,which can not work normally and can not be recovered by stopping irradiation.In the third stage,the CCD is damaged completely after being irradiated by the laser with a high energy density,and can not be recovered.Damaging mechanism of each stage is analyzed.Finally,aiming at the saturation and recovery stage of the CCD,the imaging of resolution target plate is processed with Matlab,and the influence on saturated elements and contrast of laser irradiation is analyzed.The result shows that,when CCD is irradiated by the laser,the number of saturated elements increases,and the contrast reduces to zero quickly.After the laser pulse disappears,the brightness of the whole CCD imaging reduces,and the number of saturated elements reduces to zero immediately.A moment later,the CCD returns to linear working region,and the higher the laser energy density is,the longer the recovery time is.It is found that when the recovery time is longer than 0.6 s,white stripes that can not be recovered appear,which influence imaging quality seriously.

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