Fabrication of continuously porous SiC–Si3N4 composite using SiC powder by extrusion process
Asit Kumar Gain,Jae-Kil Han,Hee-Dong Jang,Byong-Taek Lee
DOI: https://doi.org/10.1016/j.jeurceramsoc.2005.06.038
IF: 5.7
2006-01-01
Journal of the European Ceramic Society
Abstract:Large amounts of waste SiC sludge containing small amounts of Si and organic lubricant were produced during the wire cutting process of single crystal silicon ingots. Waste SiC sludge was purified by washing it with organic solvent and purified SiC powder was used to fabricate the continuously porous SiC–Si3N4 composites, using an extrusion process, in which carbon, 6wt% Y2O3+2wt% Al2O3 and ethylene vinyl acetate were added as a pore-forming agent, sintering additives and binder, respectively. In the burning-out process, the binder and carbon were fully removed and continuously porous SiC–Si3N4 composites were successfully fabricated. The green bodies containing waste SiC, Si powder and sintering additives were nitrided at 1400°C in a flowing N2+10% H2 gas mixture. The continuously porous composites contained SiC, α-Si3N4, β-Si3N4 and few Fe phases. The pore size of the second passed and third passed SiC–Si3N4 composites was 260μm and 35μm in diameter, respectively. The values of bending strength and hardness in the second passed and third passed samples were 62.97MPa, 388Hv and 77.82MPa, 423Hv, respectively.
materials science, ceramics