Construction of Self-assembled Films on Silicon and Their Tribological Behavior

PAN He,TENG Shuhua,DING Cuicui
DOI: https://doi.org/10.3969/j.issn.1005-023X.2012.15.005
2012-01-01
Abstract:Several types of self-assembled films fabricated on the silicon substrates are summarized,and the investigation progress on their tribological properties over the past 10 years are mainly introduced.Self-assembled monolayers(SAMs) are effective in reducing the friction coefficient of the silicon surface,but their loading capacity and wear resistance are poor.OTS(octadecyltrichlorosilane)-SAMs are the representative of this type.Double-and multi-layer organic films compensate to some extent for the above defects of the mono-layer films.However,their orientation and stability need to be further optimized.The advent of inorganic/organic composite films in recent years provides a new way to enhance the tribological properties of the silicon surface,which is desirable to become an important direction of future research.
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