Topographical and Performance Characterization of OTS Self-assembled Monolayer on Chemically Textured Silicon Surfaces

Pang Chongjun,Yu Bo,Song Shiyong,Gong Yujun
DOI: https://doi.org/10.3969/j.issn.0254-0150.2007.11.032
2007-01-01
Abstract:Si(100) surfaces were chemically textured with 40%NH4F and octadecyltrichlorosilane(OTS) was applied to the further self-assembling.Liquid-condensed(LC) phase molecularly thin films were formed on the bottom areas of the textured surfaces.The typical hill of the textured surfaces has a diameter of about 30 nm and a height of about 7 nm.The typical atomic force microscopy(AFM) thickness of the LC-phase OTS monolayer is about 2.3 nm.As reaction time increases,the LC-phase OTS film area coverage increases gradually and reaches the equilibrium value of about 70% after 30 min reaction time.The static contact angle of the 8 min OTS-assembled surfaces reaches about 108° and has no discernible change with the increase of reaction time or with the increase of LC-phase area coverage.The assembled OTS thin films can significantly improve the tribological properties of the textured silicon surfaces.
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