Fabrication and characterization of Mn-doped zinc silicate films on silicon wafer

Zhenguo Ji,Liu Kun,Song Yongliang,Ye Zhizhen
DOI: https://doi.org/10.1016/S0022-0248(03)01291-0
IF: 1.8
2003-01-01
Journal of Crystal Growth
Abstract:Magnesium-doped zinc silicate (Mn: Zn2SiO4) was prepared on oxidized silicon wafer using a simple sol–gel process. It is found from both XRD and UV-visible absorption experiment that when the process temperature was above 880°C, zinc silicate was formed on the silicon wafer, while when the temperature was below 880°C, zinc oxide was formed. The size of Mn: Zn2SiO4 grain in the film was about 100nm as determined by scanning force microscope. The photoluminescence (PL) spectrum showed that the peak wavelength of the green emission was at 525nm. PL decay measurement showed a lifetime of about 21ms, indicating possible application of this film in silicon-based displays.
What problem does this paper attempt to address?