Demonstration of 4H-Sic UV Single Photon Counting Avalanche Photodiode

X Xin,F Yan,P Alexandrove,CM Stahle,J Hu,A Matsumura,X Li,A Weiner,HJ Zhao
DOI: https://doi.org/10.1049/el:20057320
2005-01-01
Electronics Letters
Abstract:The first 4H-SiC UV single photon counting avalanche photodiode has been designed, fabricated and characterised. Spectral quantum efficiency from 250 to 370 nm is presented. Single photon counting at room temperature is demonstrated for the first time and counting efficiency is reported.
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