Abstract:Diamond films and carbon nanotubes can both be synthesized by microwave-plasma enhanced chemical vapor deposition (MECVD) technology. When mixture of methane, nitrogen and hydrogen is used to generate the discharge, either diamond or graphite phase, or both can be formed on the substrate. Using optical emission spectra (OES), we have found a strong correlation between the type of active species (CN and CH) and the phase of growth on the substrate. In particular, in the case of carbon nanotube growth, intensity ratio of CN and C2 radicals was found to be closely related with morphology, microstructure and graphitization degree of the samples prepared at different CH4/N2 ratio. Carbon nanotubes show well aligned from SEM picture at about 20% CH4 ratio, longer in length and denser in distribution indicate high growth rate. "Nanobell" structure from TEM results is polymerized when nitrogen dominates in the mixing gas and the length and thickness of the nanobells varied with the CH4 ratio. Raman spectra show better graphitization of sample at low CH4 ratio and more amorphous structures form when CH4 ratio increase. Relative concentration of CN to C2 radicals benefits to the alignment of nanotubes and is disadvantageous to the graphitization of samples. However, in the case of diamond growth, as indicated by optical emission spectra, CH radicals play key role in the diamond phase formation process. The effect of these radicals in plasma to the formation of diamond and graphite phase is briefly discussed.

A Mechanism of Diamond Growth with Carbon Nanotube Nucleation Agent by Hot-Filament Chemical Vapor Deposition

Preparation of Diamond Films by Hot Filament Chemical Vapor Deposition and Nucleation by Carbon Nanotubes

Mechanism of Diamond Nucleation Enhancement by Filament Carburization in HFCVD Process

Integration of Carbon Nanotubes in an HFCVD Diamond Synthesis Process in a Methane-Rich H2/CH4 Gas Mixture

Effect of CN and CH radicals on diamond and carbon nanotubes growth in MECVD

Low-Temperature Growth Of Ultra-Thin Nano-Crystalline Diamond Films By Hfcvd In A Ch4/H-2 Mixture

Effect of pressure on nanocrystalline diamond films deposition by hot filament CVD technique from CH4/H2 gas mixture

Plasma Composition During Plasma-Enhanced Chemical Vapor Deposition of Carbon Nanotubes

TEM Investigation on the Growth Mechanism of Carbon Nanotubes Synthesized by Hot-Filament Chemical Vapor Deposition.

Study on the Definite Direction Growth of Carbon Nanotubes by the Microwave Plasma-Enhanced Chemical Vapro Phase Deposition

Synthesis and Mechanism Study of Carbon Nanowires, Carbon Nanotubes, and Carbon Pompons on Single-Crystal Diamonds

The Role of the Catalytic Particle in the Growth of Carbon Nanotubes by Plasma Enhanced Chemical Vapor Deposition

Growth and Characterization of Bamboo-Like Multiwalled Carbon Nanotubes over Cu/Al2o3 Catalyst

Effect And Mechanism Of Water On Carbon Nanotubes Growth

Mechanism of Carbon Nanotube Growth in a Nano-agglomerate Fluidized Bed

Study of Controlled Growth of Carbon Nanotubes in Microstructures at Low Temperature

Growth of carbon nanotubes and nitrogen-doped carbon nanotubes on “carbon nanotube seeds”

Diamond formation mechanism in chemical vapor deposition

Transition from Carbon Nanotubes to Diamond Nanocrystals

Nitrogen overgrowth as a catalytic mechanism during diamond chemical vapour deposition