Abstract:Many high-precision optical components are made of glass, but they can also be made of a wide variety of other materials. For example, reaction-bonded silicon carbide (RB-SiC) has recently been used to make optical parts for poor working conditions due to its distinct properties such as low density, high hardness, and low thermal expansion coefficient. Thus, in order to rapidly manufacture high-precision aspherical mirrors made from RB-SiC, a novel aspheric manufacturing system equipped with magnetorheological finishing (MRF) technology is described in this paper, which incorporates a host of features and has unprecedented processing versatility. The system has four degrees of freedom, and can realize manufacture or measurement based on the Cartesian coordinate or polar coordinate systems. To achieve good surface accuracy, the polishing wheel combines self-rotation movement with corotation. The prepolishing and fine polishing processes can be done on the same machine by changing different process parameters accordingly, and the on-machine profilometer measures the aspheric forms generated during prepolishing. Experiments were carried out on the features of magnetorheological (MR) fluids by polishing a parabolic SiC mirror with a Phi 100 mm aperture. The results indicated that the required convergence speed, surface roughness, and figure accuracy can be achieved with high efficiency. The final surface roughness with an initial value of Ra = 34.39 nm reached 26.74 nm after 20 hours of prepolishing using MR fluids carrying oil (Al2O3 as the nonmagnetic particle), and then reached 1.14 nm after 50 hours of fine polishing using the MR fluid with diamond power as the nonmagnetic particle. The figure accuracy also improved to lambda 130 rms (lambda = 632.8 nm) at an arbitrary Phi 30 mm subaperture.

Manufacturing and Testing of A Cubic Sic Surface

Manufacturing and Testing of a SiC Unrotational-symmetric Aspherical Optics

The Manufacturing and Testing of an Unrotational-Symmetric Sic Mirror

Non-null Testing of the Aspheric Surface Using a Quadriwave Lateral Shearing Interferometer

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Measurement of Aspheric Surface

Air Flow Turbulence Orthogonality and Surface Error Estimation in Large Aperture Optical Testing

Determination of Aspheric Vertex Radius of Curvature in Non-Null Interferometry

Misalignment Correction for Free-Form Surface in Non-Null Interferometric Testing

Fast measurement spherical surface and fast patching up aspherical surface

Evaluation on Ground Surface Accuracies of Large-Depth and Steeply Micro-Structured SiC Surfaces

Magnetorheological Finishing of SiC Aspheric Mirrors

Complete topographic measurement of the monolithic multi-surface workpiece on a cylindrical cavity

Simulation Of Aspheric Tolerance With Polynomial Fitting

Interferometric Measurement of Freeform Surfaces Using Irregular Subaperture Stitching

Surface Testing Methods of Aspheric Optical Elements

Process Chain for Ultra-Precision and High-Efficiency Manufacturing of Large-Aperture Silicon Carbide Aspheric Mirrors

Grinding of silicon carbide for optical surface fabrication, Part 1: surface analysis

Testing of Large-Aperture Aspheric Mirrors Using a Single Coated Lens.

Measurement on a parabolic surface by quantitative shadow method in computer-controlled optical surfacing

Fabrication of a 4 m SiC Aspheric Mirror Using an Optimized Strategy of Dividing an Error Map