Understanding the Degradation of InP/InGaAs Heterojunction Bipolar Transistors Induced by Silicon Nitride Passivation

H Wang,GI Ng,H Yang,K Radhakrishnan
DOI: https://doi.org/10.1109/iciprm.2001.929105
IF: 1.5
2002-01-01
Japanese Journal of Applied Physics
Abstract:The effect of SiN passivation on the electrical characteristics of InP/InGaAs HBT's has been investigated comprehensively. The major degradations of I-V characteristics identified in our InP/InGaAs HBT's are: (1) the decrease of current gain due to a significant increase in the forward base leakage current and (2) large increase of base-collector (B-C) and base-emitter (B-E) reverse leakage currents. We found that different physical origins should be attributed to these two degradation behaviors
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