The effects of nitrogen flow on the Raman spectra of polycrystalline diamond films

Qing Zhang,S.F. Yoon,J. Ahn,Rusli,Yong-Ping Guo
DOI: https://doi.org/10.1016/S0026-2692(98)00047-0
IF: 1.992
1998-01-01
Microelectronics Journal
Abstract:The effects of nitrogen on the formation and structure of polycrystalline diamond films prepared using a microwave plasma chemical vapour deposition system have been studied using Raman scattering, X-ray diffraction and X-ray photoelectron spectroscopy. It is found that the Raman spectra are significantly affected by nitrogen flow ratio, while the X-ray diffraction spectra only show certain changes in their peak intensity. Five Raman scattering peaks at 1140, 1190, 1350, 1480 and 1550 cm−1, respectively, are clearly observed. With increasing nitrogen flow ratio, the 1480 cm−1 peak decreases significnatly and the 1140 and 1190 cm−1 peaks remain almost unchanged in comparison with the 1350 and 1550 cm−1 peaks. These results indicate that nitrogen plays an important role in modifying the structure of polycrystalline diamond films.
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