Bonding Strengths of Pcvd Films under Cyclic Loading

H CHEN,MZ YI,KW XU,JW HE
DOI: https://doi.org/10.1016/0257-8972(95)08303-0
1995-01-01
Abstract:Interfacial fatigue strength can be used as a measurement to evaluate bonding strength between a film and a substrate. The contact stress resulting in <5% area detachment of the film from a cylinder that is pressed on a rotating counterpart, after 5 × 106 cycles is taken as the interfacial fatigue strength σc. Six groups of plasma-assisted chemical vapour deposition (PCVD)-coated specimens were selected to compare σc with the results from the scratch test. Experimental results show that σc is sensitive to the interface condition and independent of the properties of substrate and film. In contrast, the critical load Lc from the scratch test is associated with load-bearing capacity of the coating system and is insensitive to interface adhesion. The bonding strength of PCVD TiN can be greatly improved when a fraction of C is included to form Ti(C,N) and the substrate surface is well prepared.
What problem does this paper attempt to address?