Phase Measurement in Digital Speckle Interferometry Metrology

Jiang Tao,Lü Xiaoxu
DOI: https://doi.org/10.3969/j.issn.1672-8513.2006.03.013
2006-01-01
Abstract:Based on the characteristic of speckle interferometry,a novel phase measurement method is attained by use of the phase variation of the object and the phase-shifting technique,and phase variation at different time.The out-of-plane tilting speckle interferogram is computer-simulated and the RMS phase error is calculated to verify reliability..
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