Fabrication and Photoluminescence Characteristics of in 2 O 3 Nanohillocks

Wei He-Lin,Zhang Lei,Liu Zu-Li,Yao Kai-Lun
DOI: https://doi.org/10.1088/1674-1056/20/11/118102
2011-01-01
Abstract:Uniformly distributed polycrystalline indium nanohillocks are synthesized on silicon substrates with Au catalyst by using the radio frequency magnetic sputtering technique.The results show that the Au catalyst plays a key role in the formation of indium nanohillocks.After thermally oxidizing the indium nanohillocks at 500°C in air for 5 h,the indium nanohillocks totally transform into In 2 O 3 nanohillocks.The energy-dispersive X-ray spectroscopy result indicates that many oxygen vacancies and oxygen-indium vacancy pairs exist in the In 2 O 3 nanohillocks.Photoluminescence spectra under an Ne laser excitation at 280 nm show broad emissions at 420 nm and 470 nm with a shoulder at 450 nm related to oxygen vacancies and oxygen-indium vacancies at room temperature.
What problem does this paper attempt to address?