Abstract:In this paper, a line-scanning irradiation of <0001> 6H-SiC single crystal by a femtosecond laser focus was implemented for laser fluence of 2.2 J/cm 2 at different scanning velocities from 1000 down to 100 μm/s. The morphology of the obtained ablation lines characterized by a scanning electron microscope shows that there progressively appear three-level ripples with average period of about 222, 600 nm and that between them. Possible formation mechanisms for these three-level ripples were analyzed by numerical simulation employing finite-difference time-domain method (FDTD). Analysis shows that as Obara proposed, the interference of incident wave with the wave scattered by scratches possibly left by fine polishing is the most possible reason for inducing 222 nm-period and 600 nm-period ripples. Main discussions were focused on the orientation characteristics of ripples. Both isolated scratches and crossed scratches with different orientation angles were considered for evaluating their role in field redistribution. The detailed simulations indicate that for scratches oriented 90° with respect to laser polarization generate a pair of strongest ripple-like optical field enhancement compared to scratches with other orientation angles. It is these advantages of 90°-oriented scratch in field enhancement that make the final ripple perpendicular to laser polarization most competitive and finally left on the surface. This complements the physical picture of Obara et al. in terms of their negligence in addressing the orientation characteristics of ripples. Further FDTD simulation of the interaction of incident wave with as-formed 600 nm-period ripples shows that the optical field enhancement located between any two adjacent 600 nm-period ripples is the driving force for splitting 600 nm-period ripples into the third ripples with period between 222 and 600 nm.

Periodic Nanoripples in the Surface and Subsurface Layers in Zno Irradiated by Femtosecond Laser Pulses

Deep-subwavelength ripples on the ZnO surface obtained via metal-film-assisted femtosecond laser processing

Formation of Long- and Short-Periodic Nanoripples on Stainless Steel Irradiated by Femtosecond Laser Pulses

Simultaneous Formation of Two Types of Periodic Nanostructure in ZnO Single Crystal by Femtosecond Laser Direct Irradiation

A uniform 290 nm periodic square structure on ZnO fabricated by two-beam femtosecond laser ablation

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

Fabrication Of Two-Dimensional Periodic Nanostructures By Two-Beam Interference Of Femtosecond Pulses

Origin of Laser-Induced Near-Subwavelength Ripples: Interference Between Surface Plasmons and Incident Laser.

Ultrafast dynamics in ZnO thin films irradiated by femtosecond lasers

Direct Writing of 150 Nm Gratings and Squares on ZnO Crystal in Water by Using 800 Nm Femtosecond Laser

Fabrication of ZnO Nanorods by Pulsed Nd:YAG Laser Ablation Deposition

Deep UV laser induced periodic surface structures on silicon formed by self-organization of nanoparticles

Infrared Femtosecond Laser-Induced Great Enhancement of Ultraviolet Luminescence of ZnO Two-Dimensional Nanostructures

Manipulation of Cross-Linked Micro/nanopatterns on ZnO by Adjusting the Femtosecond-Laser Polarizations of Four-Beam Interference

Nano-ablation of Silica by Plasmonic Surface Wave at Low Fluence.

Periodic surface micro-nanostructures on GaN films induced by femtosecond laser irradiation

Mechanism for Formation of Rippling Structure on Surface of Metallic Glasses Irradiated by Pulse Nanosecond Laser

Photoluminescence and Low-Threshold Lasing of ZnO Nanorod Arrays.

Surface Structure Analysis of ZnO Nano-Particles Fabricated by Pulsed Nd: YAG Laser Ablation under Plasma Circumstance

Micro-Nano Scale Ripples On Metallic Glass Induced By Laser Pulse

The Three-Level Ripples Induced by Femtosecond Laser on a 6H-Sic Single Crystal and the Formation Mechanism