Experimental Study on a Tree-Shaped Microchannel Network Heat Sink for MicrOeIectronic Cooling

HONG Fang-jun,CHENG Ping,CHANG Ou-liang,WU Sheng
DOI: https://doi.org/10.3321/j.issn:1006-2467.2009.10.029
2009-01-01
Abstract:Microchannel heat sink is a promising technique to dissipate high heat flux microelectronic chipsin the near future.A silicon-based heat sink with tree-shaped microchannel network for the cooling of mi- croelectronic chips was fabricated using micro electromechanical system techniques.Pt film thermo-resis-tors were also integrated on the heating surface to measure the surface temperature distribution.An exper-imental setup was built to test the pressure drop and thermal performance of the micro heat sink.The re-sults show that the experimental data agree very well with the previous 3-D numerical simulation.And,the advantages of the tree-shaped microchannel network over parallel microchannel are verified.
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