Study on Principles of Job Scheduling and Resource Configuration in IC Manufacturing

HU Zungang,YAN Liren,ZHOU Wei,LIU Zhihong
2010-01-01
Abstract:Current strategies for IC job scheduling were reviewed.As IC manufacturing machines are fixed to workstations,only wafers to be processed at different workstations are scheduled.In this work,it is suggested that machines,as another IC processing resource,may be scheduled too.A two-resource-schedule method was presented,and an IC benchmark process flow was used as an example,in which equipment capability was optimized and job scheduling was adjusted as wafer process.It has been shown that,with this method,higher machine running efficiency,lower wafer-in-process numbers,and shorter wafer processing cycle could be achieved simultaneously for IC manufacturing
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