Abstract:Semiconductor wafer fabrication is a very complicated manufacturing system which is characterized by re-entrance production flow, complicated constraints, and dynamic and uncertain environment. Bottleneck is the key factor to the wafer fabrication which has essential influence on the throughput rate, cycle time, time-delivery rate, etc. The optimal scheduling policies for bottleneck machines are conducive to cost decreasing, throughput target achieving and production-resource scheduling improving. In this paper, considering the characteristic information concerning bottleneck and the whole production line, a bottleneck prediction method based on improved adaptive network-based fuzzy inference system (ANFIS) is presented by predicting the wait time of the lot in workstation buffer and the workstation load. Then, based on the obtained bottleneck and directly considering the layer load levels of bottleneck and due date, we proposed a dynamic different layer bottleneck-based scheduling algorithm which includes releasing policy and dispatching algorithm for preventing starvation of bottleneck, balancing work in process (WIP) and higher throughput. Applied to a simulation wafer fabrication, our proposed bottleneck prediction method and bottleneck-based scheduling algorithm can reduced the cycle time and improve machine utility compared with other common heuristic scheduling method.

The Pipeline Style Job Scheduling Algorithm in an Electronic Manufacturing Automation System

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A Heuristic Method to Schedule Pipe-Processing Flowshop in a Shipyard

Optimized Machine Configuring and Job Scheduling Strategy for High Efficiency Semiconductor Manufacturing

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Application of Information Node Period Search Method to Job-Shop Scheduling

Applications of intelligent scheduling rules in semiconductor fabrication

Heuristic algorithms for a practical-size dynamic parallel-machine scheduling problem: integrated-circuit wire bonding

Scheduling Algorithm for Pipeline Synthesis

A Novel Method To Automatically Generate Batch Plans Of Products Pipelines

A MILP-based Batch Scheduling for Two-Stage Hybrid Flowshop with Sequence-Dependent Setups in Semiconductor Assembly and Test Manufacturing

A Petri Net and Extended Genetic Algorithm Combined Scheduling Method for Wafer Fabrication

Multiple-objective scheduling and real-time dispatching for the semiconductor manufacturing system

Rule-Based Scheduling of Batch Processing Machine Applied to Semiconductor Wafer Fabrication System

A Fuzzy Scheduling Method for Pipeline Processing in Shipyards Incorporating the Black Widow Optimization Algorithm

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A Bottleneck Prediction and Rolling Horizon Scheme Combined Dynamic Scheduling Algorithm for Semiconductor Wafer Fabrication.

Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system