Influence of O2/Ar Ratio on the Properties of Transparent Conductive Niobium-Doped ZnO Films

Feng Cao,YiDing Wang,KuiXue Liu,JingZhi Yin,BeiHong Long,Li,Yu Zhang,XiaMei Chen
DOI: https://doi.org/10.1007/s11434-009-0377-y
2009-01-01
Abstract:Niobium-doped ZnO transparent conductive films are deposited on glass substrates by radio frequency sputtering at 300°C. The influence of O 2 /Ar ratio on the structural, electrical and optical properties of the as-deposited films is investigated by X-ray diffraction, Hall measurement and optical transmission spectroscopy. The lowest resistivity of 4.0×10 −4 Ω·cm is obtained from the film deposited at the O 2 /Ar ratio of 1/12. The average optical transmittance of the films is over 90%.
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