Interdiffusion of an Au/Ni/Cr multilayer metallization on silicon substrates

Benda Yan,Tongliang Lin,Dali Mao,Chensen Yang
DOI: https://doi.org/10.1016/0040-6090(89)90535-X
IF: 2.1
1989-01-01
Thin Solid Films
Abstract:The Au/Ni/Cr multilayer metallization is widely used in silicon devices for interconnections. The interdiffusion behaviour within the metallization and with the silicon substrate is of great practical importance. Sheet resistivity measurements and the Auger electron spectroscopy profiling technique have been used to study the interdiffusion behaviour and the effectiveness of the chromium and nickel layers as diffusion barriers. Interdiffusion became dramatic with an increase in the annealing temperature. At 250°C there was almost no interdiffusion. When the annealing temperature was increased above 450°C interdiffusion was observed to occur significantly. Chromium was found to be a good diffusion barrier for interdiffusion between gold and silicon. For a thin chromium layer 35nm thick, it remained effective until 450°C. Its thermal stability was limited by the out-diffusion of chromium through the gold overlayer. Contrary to previous expectations, nickel was not an effective diffusion barrier for interdiffusion between gold and silicon. It was only useful for improving the solderability of the metallization. Interdiffusion between gold and silicon and out-diffusion of chromium through gold were found to be responsible for the increase of the sheet resistivity and detrimental to the solderability of the metallization. The out-diffusion of silicon was the dominating process of interdiffusion between gold and the silicon substrate.
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