Interface reactions of an Ag/Cr/AlN sandwich during annealing between 250 and 650 °C

F. Pan,K. Tao,Y. Du,B.X. Liu
DOI: https://doi.org/10.1016/0040-6090(95)06686-1
IF: 2.1
1995-01-01
Thin Solid Films
Abstract:An Ag/Cr/AlN sandwich was prepared by deposition of pure silver and chromium on an AlN polycrystalline substrate. As-deposited samples were then annealed between 250 and 650 degrees C to investigate the interface reactions in the Ag/Cr/AlN sandwich. When the annealing temperature was higher than 350 degrees C, interdiffusion at the AlN/Cr and Cr/Ag interfaces was observed. When the annealing temperature exceeded 550 degrees C, Cr atoms diffused outwards to the surface across the Ag layer.
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