Design of Optoelectronic Detection System for Deep Sub-micron Flying Height Measuring

WANG Liang,LI Yu-he,LI Qing-xiang,CHEN Zhang-wei
DOI: https://doi.org/10.3969/j.issn.1001-1390.2006.03.002
2006-01-01
Abstract:Based on the optoelectronic sense principle,a set of optoelectronic detection system for deep sub-micron flying height measuring is designed,which focuses on the preamplifier and post amplifier.It is a high-speed and high-precision data acquisition system,and the system control interactive interface is introduced.Analysis and experiment show that this system has proper parameters on linearity of optoelectronic detection system,measuring resolution and dynamic frequency,and can realize dynamic measuring for the deep sub-micron flying height.
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