Abstract:Diamond films with different crystal structures, morphologies and surface characteristics were synthesized under various deposition parameters and annealing conditions by the microwave plasma chemical vapor deposition (MWPCVD) method using gas mixtures of CH4, CO and H2. The effects of CH4 concentrations, grain sizes, grain orientations, film thicknesses and annealing technologies in various ambient gases on planar electron emission of diamond films were studied. The results show that small-grained and (011)-oriented diamond films deposited under the condition of high CH4 concentration present the properties of high emission current and low threshold voltage; the emission current increases with decreasing the film thickness. There are largest current density and lowest threshold voltage at the film thickness of 1.5 μm. The annealing in H2 after deposition appears to be more beneficial in lowering the threshold voltage, increasing emission current and improving stability for electron emission of films than annealing in N2 or Ar. These results indicate that diamond thin films with high emission current, low threshold voltage and high stability can be obtained by selecting suitable deposition parameters of diamond films.

Micro-structure of PECVD Diamond Films by Slow Positron Beam

Micro-Raman analysis of the cross section for diamond film prepared by chemical vapor deposition

Micro-Raman Analysis of the Cross-Section of a Diamond Film Prepared by Hot-Filament Chemical Vapor Deposition

Micro-Raman Spectroscopy and Cathodoluminescence Study of Cross-section of Diamond Film

Cathodoluminescence and positron annihilation of defects in diamond films formed by d.c. plasma CVD

Pulsed Laser Scanning Deposition of Diamondlike Thin Films

Morphologies and structures of chemical vapor deposited diamond films and film-substrate interfaces

The Structural Evolution Of Nanocrystalline Diamond Films Synthesized By R.F. Pecvd

Microcrystalline Diamond Films By Direct Ion Beam Deposition

Structural Investigation Of Diamond Thin-Films Synthesized By Dual Ion-Beam Deposition

Ultraviolet and visible Raman spectroscopy characterization of chemical vapor deposition diamond films

Raman Spectral Research on MPCVD Diamond Film

Diamond-Like Carbon films by low energy positron beam

Pulsed laser scanning deposition of diamond like thin films

Study On Photodiodes Of Cvd Diamond Films

Microstructure and Chemical Bond Evolution of Diamond-Like Carbon Films Machined by Femtosecond Laser

A polycrystalline diamond micro-detector for X-ray absorption fine-structure measurements

Electron Emission from Diamond Thin Films Deposited by Microwave Plasma-Chemical Vapor Deposition Method

The enhanced nucleation factors and field electron emission property of diamond synthesized by RF-PECVD

Study on Morphologies and Structures of Diamond Films Synthesized on Cemented Carbide Substrates

Structural and Optical Analysis of the Diamond Films for FED Application