Abstract:Organic-polymer photoresist is the medium and carrier of micro manufacturing by two-color sensitive direct laser writing technology, which directly affects the accuracy and authenticity of the micro structures. In this work, polyvinylpyrrolidone (PVP) is introduced into pentaerythritol triacrylate (PETA) to control the viscosity, mechanical strength, volume shrinkage and polymerization rate of photoresist. The results show that hydrogen bond is formed between PVP and PETA, which can be used as a crosslinking site to improve the crosslinking degree of photoresist. Meanwhile, the introduction of PVP also increases the viscosity of the system, reduces the oxygen inhibition, and finally effectively improves the photo-polymerization conversion rate (30.1%) of PETA in photoresist, obtaining higher sensitivity and lower polymerization threshold (6.5 mW, 20 wt% PVP). In addition, the PVP sharply reduces the volume shrinkage of photoresist from 18% to 3%, greatly weakening the internal stress of the fabricated structure, thus improving the lithography performance of micro structures. Finally, the minimum linewidth of PVP composited photoresist can reach 48 nm, which has higher uniformity and regularity than that of photoresist without PVP. Thus, this work is of great significance for high-precision and high-quality micro manufacturing and various applications. [GRAPHICS]

Improved Mastering Material for Multilevel Blue Laser Disc.

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Polyvinylpyrrolidone Hybrid Photoresist for Two-color Sensitive Direct Laser Writing

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Modeling and Realization of a Multilevel Read-Only Disk

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Laser Direct Writing System and Its Lithography Properties

Theoretical and Experimental Analyses of Recording Mark Microstructures in Signal Waveform Modulation Optical Disc

Super-Resolution Near-Field Phase Change Disk with Sb70Te30 Mask Layer

New Method of Two-Photon Multi-Layer Optical Disc Storage

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Blu-ray Type Super Resolution Near Field Optical Disk with Sb 2 Te 3 Mask Layers and a Thermal Shield Layer in Front of the Mask Layer

Super-Resolution Near-Field Optical Disk With An Additional Localized Surface Plasmon Coupling Layer

Multilevel Optical Data Recording Methods on Phase-Change Media

Advanced Materials for High-Density Optical Storage