Binary Pure-Phase Filter Optimized the Optical Distribution of Solid Immersion Lens

YH Lu,JP Xie,M Hai
DOI: https://doi.org/10.1016/s0030-4018(02)02237-x
IF: 2.4
2003-01-01
Optics Communications
Abstract:A binary (π/2−0) two-zone phase filter is proposed to optimize the optical distribution of solid immersion lens (SIL). The analysis using angular spectrum method shows that the phase filter can not only decrease the full-width at half maximum (FWHM) of the optical distribution but also increase the depth of focus of the SIL system. Furthermore, the lateral distribution profile is also optimized.
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